High throughput direct writing of a mesoscale binary optical element by femtosecond long focal depth beams
Yang Yue, Erse Jia, Xinyu Ma, Chen Xie, Bowen Liu, Yanfeng Li, Minglie Hu
Abstract
Bessel beams have multiple applications owing to their propagation-invariant properties, including particle trapping, optical coherence tomography, and material processing. However, traditional Bessel-beam shaping techniques require bulky components, which limits the development of miniaturized optical systems for integration with other devices. Here, we report a novel femtosecond laser direct writing strategy for fabricating mesoscale (from submicrometer to subcentimeter) binary optical elements with microscale resolution. This strategy utilizes femtosecond beams with a long focal depth to increase throughput while reducing the constraints on critical sample positioning. As a demonstration, we manufactured and characterized a 2.2 mm diameter binary axicon. The experimentally measured quasi-Bessel beam intensity distribution and the numerical results were remarkably consistent, demonstrating a suitable tradeoff between the overall size, efficiency, and structural fidelity. Furthermore, a compact Bessel lens containing binary axicons was constructed and successfully used for femtosecond laser mask-less ablation of periodic grating-type surface plasmon polariton excitation units. The demonstrated approach shows significant potential for fabricating customizable integrated optical components.