Litcius/Paper detail

Investigation of the influence of the features of the deposition process on the structural features of microparticles in PVD coatings

Sergey N. Grigoriev, Alexey Vereschaka, Vsevolod Zelenkov, Nikolay Sitnikov, Jury Bublikov, Filipp Milovich, Nikolay Andreev, Catherine Sotova

2022Vacuum74 citationsDOI

Topics & Concepts

MicroparticleCoatingDeposition (geology)Materials sciencePhysical vapor depositionChemical engineeringSubstrate (aquarium)NanotechnologyEngineeringSedimentOceanographyBiologyGeologyPaleontologyVacuum and Plasma ArcsAdvanced Sensor Technologies ResearchEngineering Technology and Methodologies
Investigation of the influence of the features of the deposition process on the structural features of microparticles in PVD coatings | Litcius