Oxidation and Degradation of WS <sub>2</sub> Monolayers Grown by NaCl-Assisted Chemical Vapor Deposition: Mechanism and Prevention
Yao‐Pang Chang, Wei-Bang Li, Yueh-Chiang Yang, Hsueh-Lung Lu, Ming‐Fa Lin, Po‐Wen Chiu, Kuang‐I Lin
Abstract
Adjusting the orientation of the sapphire substrate to align the gas flow direction in the NaCl-assisted CVD process can improve the stability of monolayer WS 2 .
Topics & Concepts
Degradation (telecommunications)Chemical vapor depositionMaterials scienceMonolayerAbsorption (acoustics)PhotochemistryChemical physicsChemical engineeringChemistryOptoelectronicsNanotechnologyTelecommunicationsEngineeringComposite materialComputer science2D Materials and ApplicationsChalcogenide Semiconductor Thin FilmsZnO doping and properties