Effect of oxygen/argon ratio on microstructure, compositon and optical properties of erbium oxide anti-reflection films on CVD diamond
Yabo Huang, Chengming Li, Liangxian Chen, Jinlong Liu, Junjun Wei, Xulei Wang, Xiaohua Zhu
Topics & Concepts
Materials scienceArgonX-ray photoelectron spectroscopyMicrostructureAnalytical Chemistry (journal)CrystalliteChemical vapor depositionSputter depositionOxygenSputteringThin filmNanotechnologyChemistryComposite materialChemical engineeringMetallurgyOrganic chemistryChromatographyEngineeringDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsIon-surface interactions and analysis