Interface control of tetragonal ferroelectric phase in ultrathin Si-doped HfO2 epitaxial films
Tao Li, Juncai Dong, Nian Zhang, Zicheng Wen, Zhenzhong Sun, Yang Hai, Kewei Wang, Huanyu Liu, Nobumichi Tamura, Shao‐Bo Mi, Shao‐Dong Cheng, Chuansheng Ma, Yunbin He, Lei Li, Shanming Ke, Haitao Huang, Yongge Cao
Topics & Concepts
FerroelectricityMaterials scienceTetragonal crystal systemEpitaxyThin filmPiezoresponse force microscopyPolarization (electrochemistry)OptoelectronicsDopingNanotechnologyPerovskite (structure)Phase (matter)Layer (electronics)CrystallographyDielectricPhysical chemistryChemistryOrganic chemistryFerroelectric and Negative Capacitance DevicesElectronic and Structural Properties of OxidesFerroelectric and Piezoelectric Materials