A Journey from Bulk MOSFET to 3 nm and Beyond

Asharani Samal, Suman Lata Tripathi, Sushanta Kumar Mohapatra

2020Transactions on Electrical and Electronic Materials60 citationsDOI

Topics & Concepts

Materials scienceMiniaturizationMOSFETCMOSEngineering physicsSubthreshold conductionNanotechnologyNanosheetMetal gateOptoelectronicsScalingGate dielectricElectrical engineeringTransistorGate oxideEngineeringVoltageMathematicsGeometrySemiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit DesignFerroelectric and Negative Capacitance Devices