Synthesis, structure and optical properties of high-quality VO2 thin films grown on silicon, quartz and sapphire substrates by high temperature magnetron sputtering: Properties through the transition temperature
Chunzi Zhang, Cyril Koughia, Ozan Güneş, JunYan Luo, Nazmul Hossain, Yuanshi Li, Xiaoyu Cui, Shi-Jie Wen, Rick Wong, Q. Yang, Safa Kasap
Topics & Concepts
Materials scienceThin filmSapphireX-ray photoelectron spectroscopySputter depositionMicrostructureAnalytical Chemistry (journal)SputteringSiliconOptoelectronicsOpticsNanotechnologyChemistryComposite materialNuclear magnetic resonanceChromatographyLaserPhysicsTransition Metal Oxide NanomaterialsGa2O3 and related materialsGas Sensing Nanomaterials and Sensors