A fitting algorithm for optimizing ion implantation energies and fluences
Pauli Kehayias, Jacob Henshaw, Maziar Saleh Ziabari, Michael Titze, Edward S. Bielejec, Michael Lilly, Andrew Mounce
2021Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms16 citationsDOIOpen Access PDF
Topics & Concepts
AlgorithmIonIon implantationComputer scienceComputational physicsMaterials scienceAtomic physicsPhysicsQuantum mechanicsDiamond and Carbon-based Materials ResearchIon-surface interactions and analysisSemiconductor materials and devices