Deposition characteristics and influence regularity of sputtered products in a low-power RF gridded ion thruster
Yicheng Dong, Weiyi Kong, Weizong Wang, Guangchuan Zhang, Mingyue Han, Zhehong Wang, Haibo Wang, Yifei Li, Chencong Fu, Xingda Li
Topics & Concepts
Ion thrusterDeposition (geology)IonMaterials scienceRF power amplifierPower (physics)SputteringIon beam depositionOptoelectronicsAnalytical Chemistry (journal)ChemistryIon beamThin filmNanotechnologyPhysicsGeologyEnvironmental chemistryThermodynamicsOrganic chemistryCMOSPaleontologySedimentAmplifierPlasma Diagnostics and ApplicationsElectrohydrodynamics and Fluid DynamicsMetal and Thin Film Mechanics