Surface micromorphology and nanostructures evolution in hybrid laser processes of slicing and polishing single crystal 4H-SiC
Yuhang Li, Zhe Zhang, Zhe Zhang, Qi Song, Haiyan Shi, Yu Hou, Song Yue, Ran Wang, Shunshuo Cai, Zichen Zhang, Zichen Zhang
Topics & Concepts
Materials sciencePolishingSlicingSurface roughnessLaserMachiningComposite materialResidual stressSurface finishGrindingSurface layerChemical-mechanical planarizationSurface integrityLayer (electronics)OpticsMetallurgyMechanical engineeringPhysicsEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchLaser Material Processing Techniques