Electrical Properties of MOS Capacitor with TiO2/SiO2 Dielectric Layer
Saime Şebnem Çetin, Halil İbrahim Efkere, Tunc Sertel, A. Tataroğlu, Süleyman Özçelik
Topics & Concepts
Materials scienceCapacitorDielectricOptoelectronicsFourier transform infrared spectroscopyWaferSputter depositionOxideLayer (electronics)UltravioletEquivalent series resistanceSemiconductorSputteringThin filmComposite materialOpticsNanotechnologyVoltageElectrical engineeringMetallurgyPhysicsEngineeringSemiconductor materials and devicesSemiconductor materials and interfacesSilicon Nanostructures and Photoluminescence