Comparison on the structural, mechanical and tribological properties of TiAlN coatings deposited by HiPIMS and Cathodic Arc Evaporation
M-R. Alhafian, Jean‐Baptiste Chemin, Y.H. Fleming, Laure Bourgeois, M. Penoy, Ralph Useldinger, F. Soldera, Frank Mücklich, Patrick Choquet
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceMicrostructureMetallurgyPhysical vapor depositionComposite materialTribologyResidual stressCoatingCarbideSputter depositionSputteringThin filmNanotechnologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchHigh-Temperature Coating Behaviors