Fabrication and characterization of CrNbSiTiZr high-entropy alloy films by radio-frequency magnetron sputtering via tuning substrate bias
Xu Yu, Junjun Wang, Linqing Wang, Weijiu Huang
Topics & Concepts
Materials scienceBiasingSputter depositionSputteringMicrostructureCorrosionAlloyAmorphous solidComposite materialMetallurgyThin filmNanotechnologyVoltageCrystallographyQuantum mechanicsChemistryPhysicsHigh Entropy Alloys StudiesHigh-Temperature Coating BehaviorsMetal and Thin Film Mechanics