Highly transparent piezoelectric PZT membranes for transducer applications
Franklin Pavageau, C. Dieppedale, P. Perreau, Romain Liechti, Antoine Hamelin, Christophe Licitra, F. Casset, G. Le Rhun
Topics & Concepts
Materials sciencePiezoelectricityPMUTWaferDielectricCapacitorFabricationStack (abstract data type)OptoelectronicsTransducerFerroelectricityNanogeneratorVoltageElectrodeMembraneComposite materialAcousticsElectrical engineeringGeneticsPathologyMedicineProgramming languagePhysicsEngineeringAlternative medicineBiologyComputer scienceChemistryPhysical chemistryFerroelectric and Piezoelectric MaterialsAdvanced Sensor and Energy Harvesting MaterialsAcoustic Wave Resonator Technologies