Optimization of temperature coefficient of resistance of Al-doped vanadium oxide thin film prepared by atomic layer deposition for uncooled microbolometer
Heecheol Shin, Le Thai Duy, Hyungtak Seo
Topics & Concepts
Materials scienceAtomic layer depositionDopingTemperature coefficientDopantMicrobolometerVanadiumAnnealing (glass)Vanadium oxideAtmospheric temperature rangeThin filmAnalytical Chemistry (journal)OxideChemical engineeringNanotechnologyOptoelectronicsComposite materialMetallurgyBolometerChemistryElectrical engineeringOrganic chemistryPhysicsEngineeringMeteorologyDetectorTransition Metal Oxide NanomaterialsGas Sensing Nanomaterials and SensorsZnO doping and properties