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Crystallization behavior of N -doped Ge-rich GST thin films and nanostructures: An in-situ synchrotron X-ray diffraction study

Ο. Thomas, Cristian Mocuta, Magali Putero, Marie‐Ingrid Richard, P. Boivin, F. Arnaud

2021Microelectronic Engineering20 citationsDOIOpen Access PDF

Topics & Concepts

Materials scienceCrystallizationAnnealing (glass)Amorphous solidSynchrotronDiffractionGrain sizeCrystallographyDopingGermaniumX-ray crystallographyThin filmIn situAnalytical Chemistry (journal)NanotechnologyChemical engineeringOptoelectronicsOpticsSiliconComposite materialChemistryChromatographyOrganic chemistryPhysicsEngineeringPhase-change materials and chalcogenidesLiquid Crystal Research AdvancementsChalcogenide Semiconductor Thin Films
Crystallization behavior of N -doped Ge-rich GST thin films and nanostructures: An in-situ synchrotron X-ray diffraction study | Litcius