Relationship between structure, surface topography and tribo-mechanical behavior of Ti-N thin films elaborated at different N2 flow rates
Linda Aissani, Akram Alhussein, A. Ayad, Corinne Nouveau, Elia Zgheib, Ahlam Belgroune, Mourad Zaabat, R. Barillé
Topics & Concepts
MicrostructureMaterials scienceComposite materialTetragonal crystal systemGrain sizeSputter depositionThin filmTinSputteringTitanium nitrideNitrideMetallurgyCrystal structureCrystallographyNanotechnologyLayer (electronics)ChemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchPlasma Diagnostics and Applications