Assessment of sustainable and machinable performance metrics of monocrystalline silicon carbide wafer with electrophoretic-assisted multi-diamond wire sawing
Eyob Messele Sefene, Chao-Chang Arthur Chen, Yueh-Hsun Tsai, Ting-Huan Lai, Ding-Xuan Huang
Topics & Concepts
Monocrystalline siliconSilicon carbideWaferDiamondMaterials scienceMetallurgySiliconNanotechnologyAdvanced Machining and Optimization TechniquesAdvanced Surface Polishing TechniquesSemiconductor materials and devices