Investigation of contamination particles generation and surface chemical reactions on Al2O3, Y2O3, and YF3 coatings in F-based plasma
Jongho So, MinJoong Kim, Hyuksung Kwon, Seonjeong Maeng, Eunmi Choi, Chin‐Wook Chung, Ju‐Young Yun
Topics & Concepts
CoatingX-ray photoelectron spectroscopyPlasma cleaningOxideAnodizingMaterials sciencePlasmaContaminationAtmospheric-pressure plasmaSurface roughnessChemical engineeringAnalytical Chemistry (journal)Composite materialChemistryMetallurgyEnvironmental chemistryEcologyQuantum mechanicsPhysicsEngineeringAluminiumBiologyPlasma Diagnostics and ApplicationsMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research