High efficient polishing of sliced 4H-SiC (0001) by molten KOH etching
Yi Zhang, Hongyingnan Chen, Dianzi Liu, Hui Deng
Topics & Concepts
PolishingMaterials scienceEtching (microfabrication)DislocationSilicon carbideChemical-mechanical planarizationIsotropic etchingCrystal (programming language)Surface roughnessCarbideSingle crystalGrindingSurface finishSemiconductorComposite materialMetallurgyOptoelectronicsCrystallographyChemistryProgramming languageComputer scienceLayer (electronics)Silicon Carbide Semiconductor TechnologiesAdvanced Surface Polishing TechniquesAdvanced ceramic materials synthesis