Implementing (K,Na)NbO3-based lead-free ferroelectric films to piezoelectric micromachined ultrasonic transducers
Yu Huang, Liang Shu, Fade Hu, Lisha Liu, Zhen Zhou, Yue‐Yu‐Shan Cheng, Suwei Zhang, Wei Li, Qian Li, Hongliang Wang, Zhinan Dong, Liyu Wei, Chuan Luo, Jing‐Feng Li
Topics & Concepts
Materials sciencePiezoelectricityUltrasonic sensorFerroelectricityPMUTTransducerLead (geology)Capacitive micromachined ultrasonic transducersAcousticsOptoelectronicsComposite materialDielectricGeomorphologyGeologyPhysicsFerroelectric and Piezoelectric MaterialsAcoustic Wave Resonator TechnologiesUltrasonics and Acoustic Wave Propagation