Application of ultrasonic sprayed zirconium oxide dielectric in zinc tin oxide-based thin film transistor
Abayomi Titilope Oluwabi, Atanas Katerski, Emanuel Carlos, Rita Branquinho, Arvo Mere, Malle Krunks, Elvira Fortunato, L. Pereira, Ilona Oja Açik
Abstract
A typical schematic for both spray pyrolysis set-up and ZrO<sub>x</sub>-based TFT device, and the corresponding electrical performance.
Topics & Concepts
Materials scienceThin-film transistorSchematicDielectricOptoelectronicsZirconium oxideOxideTin oxideComposite materialMetallurgyLayer (electronics)Electronic engineeringEngineeringThin-Film Transistor TechnologiesZnO doping and propertiesSemiconductor materials and devices