Growth of ZrO2 films on mesoporous silica sieve via atomic layer deposition
Letícia F. Rasteiro, Md Abdul Motin, Luiz H. Vieira, Elisabete M. Assaf, Francisco Zaera
Topics & Concepts
Mesoporous materialX-ray photoelectron spectroscopyMesoporous silicaAmorphous solidChemical engineeringMaterials scienceDeposition (geology)AdsorptionMolecular sieveChemisorptionLayer (electronics)Transmission electron microscopyThin filmNanotechnologyAnalytical Chemistry (journal)ChemistryCrystallographyPhysical chemistryOrganic chemistryCatalysisBiologySedimentEngineeringPaleontologySemiconductor materials and devicesCatalytic Processes in Materials ScienceElectronic and Structural Properties of Oxides