Formation of porous germanium layers with various surface morphology in dependence on mass of implanted ions
A.M. Rogov, В. И. Нуждин, В. Ф. Валеев, А. Л. Степанов
Topics & Concepts
GermaniumMorphology (biology)IonNanoporousScanning electron microscopeMaterials sciencePorosityIon implantationIrradiationAnalytical Chemistry (journal)CrystallographyChemistryNanotechnologyComposite materialSiliconOptoelectronicsChromatographyGeneticsOrganic chemistryBiologyPhysicsNuclear physicsSilicon Nanostructures and PhotoluminescenceIon-surface interactions and analysisSemiconductor materials and devices