High-quality efficient anti-reflection nanopillar structures layer prepared by a new type vibration-assisted UV nanoimprint lithography
Yan Gu, Si Chen, Jieqiong Lin, Hongyu Xu, XianYao Li
Topics & Concepts
Nanoimprint lithographyMaterials sciencePhotoresistNanopillarLayer (electronics)OptoelectronicsResistLithographyNanostructureComposite materialNanotechnologyOpticsFabricationPathologyMedicineAlternative medicinePhysicsNanofabrication and Lithography TechniquesMicrofluidic and Bio-sensing TechnologiesNear-Field Optical Microscopy