Synthesis and characterization of nanocomposite Fe3O4/SiO2 core–shell abrasives for high-efficiency ultrasound-assisted magneto-rheological polishing of sapphire
Quan Zhai, Wenjie Zhai, Bo Gao, Yiqing Shi, Xiquan Cheng
Topics & Concepts
Materials sciencePolishingSapphireAbrasiveChemical-mechanical planarizationTetraethyl orthosilicateWaferComposite materialNanocompositeSurface roughnessCore (optical fiber)NanotechnologyOpticsPhysicsLaserAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchLaser Material Processing Techniques