Blister formation in He-H co-implanted InP: A comprehensive atomistic study
N. Daghbouj, Jiajie Lin, Hüseyin Şener Şen, M. Callisti, Bingsheng Li, Miroslav Karlı́k, Tomáš Polcar, Zhenghao Shen, Min Zhou, Tiangui You, Xin Ou
Topics & Concepts
FluenceBlistersAnnealing (glass)Materials scienceIonNanoscopic scaleMolecular dynamicsTrappingChemical physicsCrystallographyMolecular physicsAnalytical Chemistry (journal)Atomic physicsNanotechnologyChemistryComputational chemistryComposite materialPhysicsBiologyOrganic chemistryEcologyChromatographySemiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit DesignElectronic and Structural Properties of Oxides