Deep Learning-Based Phase Aberration Estimation for Ultra-Precise Silicon Wafer Metrology
Hwan Kim, Y.‐M. Kim, Yusuke Ito, Naohiko Sugita, Mamoru Mitsuishi
Topics & Concepts
MetrologyWaferPhase (matter)SiliconMaterials scienceOpticsComputer scienceOptoelectronicsPhysicsQuantum mechanicsOptical measurement and interference techniquesImage Processing Techniques and ApplicationsIntegrated Circuits and Semiconductor Failure Analysis