Indentation response characteristics of a piezoelectric semiconductor layer
Shijing Gao, Chengjian Ju, Guoquan Nie, Jinxi Liu, Weiqiu Chen
Topics & Concepts
IndentationMaterials sciencePiezoelectricityLayer (electronics)SemiconductorStructural engineeringComposite materialAcousticsEngineeringOptoelectronicsPhysicsAcoustic Wave Resonator TechnologiesMetal and Thin Film MechanicsFerroelectric and Piezoelectric Materials