Enhancement in piezoelectric responses of AlN thin films by co-addition of Mg and Ta
Sri Ayu Anggraini, Masato Uehara, Kenji Hirata, Hiroshi Yamada, Morito Akiyama
Topics & Concepts
CrystallinityMaterials scienceNitrideTantalumAluminiumPiezoelectricityMagnesiumThin filmTantalum nitridePiezoelectric coefficientDopantAnalytical Chemistry (journal)MetallurgyComposite materialNanotechnologyLayer (electronics)DopingChemistryOptoelectronicsChromatographyAcoustic Wave Resonator TechnologiesGaN-based semiconductor devices and materialsMetal and Thin Film Mechanics