Study of TiAlN coatings deposited by continuous high power magnetron sputtering (C-HPMS)
Liangliang Liu, Lin Zhou, Wei Tang, Qingdong Ruan, Xiaoyuan Li, Zhongcan Wu, Zhongcan Wu, Abdul Mateen Qasim, Suihan Cui, Tijun Li, Xiubo Tian, Ricky K.Y. Fu, Zhongzhen Wu, Zhongzhen Wu, Paul K. Chu
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceSputter depositionCoatingCavity magnetronMetallurgySputteringPhysical vapor depositionCathodeDeposition (geology)Ion platingSurface roughnessComposite materialThin filmNanotechnologyPhysical chemistryBiologyChemistrySedimentPaleontologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchIon-surface interactions and analysis