Effect of porosity on etching rate and crater-like microstructure of sintered Al2O3, Y2O3, and YAG ceramics in plasma etching
Eun‐Bi Kim, Cheng‐Cai Zhao, Young‐Jo Park, Mi‐Ju Kim, Ho Jin, Ha‐Neul Kim, Jae‐Woong Ko, Seog-Young Yoon, Jae‐Wook Lee
Topics & Concepts
Materials scienceMicrostructureEtching (microfabrication)Impact craterYttriumCeramicComposite materialSapphirePorosityReactive-ion etchingRelative densityPlasmaYttrium aluminium garnetPlasma etchingMineralogyAnalytical Chemistry (journal)LaserMetallurgyOpticsDopingOptoelectronicsOxideChemistryPhysicsQuantum mechanicsChromatographyLayer (electronics)AstronomyPlasma Diagnostics and ApplicationsDust and Plasma Wave PhenomenaZnO doping and properties