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Influences of substrate types and heat treatment conditions on structural and thermoelectric properties of nanocrystalline Bi2Te3 thin films formed by DC magnetron sputtering

Takuya Kurokawa, Ryotaro Mori, Oga Norimasa, Tomoyuki Chiba, Rikuo Eguchi, Masayuki Takashiri

2020Vacuum57 citationsDOI

Topics & Concepts

Materials scienceSeebeck coefficientThermoelectric effectNanocrystalline materialSputter depositionThin filmThermal conductivityCrystalliteComposite materialAnnealing (glass)SputteringAnalytical Chemistry (journal)MetallurgyNanotechnologyChemistryThermodynamicsChromatographyPhysicsAdvanced Thermoelectric Materials and DevicesThermal properties of materialsAdvanced Thermodynamics and Statistical Mechanics
Influences of substrate types and heat treatment conditions on structural and thermoelectric properties of nanocrystalline Bi2Te3 thin films formed by DC magnetron sputtering | Litcius