Curing defects in plasma-enhanced atomic layer deposition of Al2O3 by six methods
Jehyun An, Kyeong-Keun Choi, Bohyeon Kang, Rock‐Hyun Baek
Topics & Concepts
Materials scienceAtomic layer depositionCuring (chemistry)PlasmaLayer (electronics)Chemical engineeringComposite materialQuantum mechanicsPhysicsEngineeringSemiconductor materials and devicesCopper Interconnects and ReliabilityZnO doping and properties