Effects of UV-ozone treatment on the performance of deep-ultraviolet photodetectors based on ZnGa2O4 epilayers
Ray‐Hua Horng, Yunsheng Li, Kun‐Lin Lin, Fu‐Gow Tarntair, Siri Nittayakasetwat, Ching‐Lien Hsiao
Topics & Concepts
OzoneUltravioletPhotocurrentX-ray photoelectron spectroscopyOxygenMaterials scienceChemical vapor depositionAnalytical Chemistry (journal)SapphireUltraviolet photoelectron spectroscopyPhotoconductivityOptoelectronicsPhotochemistryChemistryOpticsChemical engineeringEnvironmental chemistryPhysicsLaserEngineeringOrganic chemistryGa2O3 and related materialsZnO doping and propertiesLuminescence Properties of Advanced Materials