Potassium persulfate as an oxidizer in chemical mechanical polishing slurries relevant for copper interconnects with cobalt barrier layers
Lifei Zhang, Tongqing Wang, Xinchun Lu
Topics & Concepts
Chemical-mechanical planarizationSlurryMaterials scienceCopperCobaltPotassium persulfatePolishingX-ray photoelectron spectroscopyChemical engineeringScanning electron microscopePersulfateEtching (microfabrication)Hydrogen peroxideNuclear chemistryMetallurgyComposite materialChemistryPolymerCatalysisOrganic chemistryPolymerizationEngineeringLayer (electronics)Semiconductor materials and devicesElectrodeposition and Electroless CoatingsAnodic Oxide Films and Nanostructures