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Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines

Shirly Espinoza, Fabio Samparisi, Fabio Frassetto, Steffen Richter, Mateusz Rębarz, O. Finke, Martin Albrecht, M. Jurkovič, O. Hort, Nicola Fabris, Anna Zymaková, Dong‐Du Mai, Roman Antipenkov, J. Nejdl, Luca Poletto, Jakob Andreasson

2020Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena15 citationsDOIOpen Access PDF

Abstract

In this paper, the authors present the characterization experiments of a 20 fs vacuum ultraviolet beam from a high harmonic generation source. The beam hits a silicon sample and passes a triple reflection gold polarizer located inside an ultrahigh vacuum chamber. The polarizer’s Malus curve was obtained; the total acquisition time for each point of the curve was 30 s. This aims to be the first vacuum ultraviolet time-resolved user station dedicated to ellipsometry. The high harmonic beam is generated by a 12 mJ, 1 kHz, 20 fs, in-house-developed laser and detected by a back-illuminated charge-coupled device.

Topics & Concepts

PolarizerMaterials scienceOpticsEllipsometryVacuum ultravioletOptoelectronicsLaserHigh harmonic generationHarmonicsBeam (structure)Characterization (materials science)PhysicsThin filmNanotechnologyBirefringenceQuantum mechanicsVoltagePlasma Diagnostics and ApplicationsPhotocathodes and Microchannel PlatesIon-surface interactions and analysis
Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines | Litcius