Effect of bias voltages on microstructure and properties of (TiVCrNbSiTaBY)N high entropy alloy nitride coatings deposited by RF magnetron sputtering
Xiangyu Zhang, Vasiliy Pelenovich, Yan Liu, Xianwen Ke, Jun Zhang, Bing Yang, Guanbing Ma, Ming Li, Xianbin Wang
Topics & Concepts
Materials scienceMicrostructureAlloySputter depositionNitrideHigh-power impulse magnetron sputteringSputteringBiasingOptoelectronicsVoltageMetallurgyComposite materialThin filmNanotechnologyElectrical engineeringLayer (electronics)EngineeringMetal and Thin Film MechanicsHigh Entropy Alloys StudiesDiamond and Carbon-based Materials Research