Effect of deposition temperature on the microstructure and tribological properties of Si-DLC coatings prepared by PECVD
Biao Huang, Lan-tian Liu, Sheng Han, Haoming Du, Qiong Zhou, Ergeng Zhang
Topics & Concepts
Materials scienceMicrostructureTribologyPlasma-enhanced chemical vapor depositionCoatingComposite materialLayer (electronics)Deposition (geology)Chemical vapor depositionGraphiteToughnessDiamond-like carbonLubricantCarbon fibersMetallurgyThin filmNanotechnologyComposite numberSedimentBiologyPaleontologyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsLubricants and Their Additives