Effects of argon/nitrogen sputtering gas on the microstructural, crystallographic and piezoelectric properties of AlN thin films
Muhammad Izzuddin Abd Samad, Mimiwaty Mohd Noor, Nafarizal Nayan, Ahmad Shuhaimi Abu Bakar, Marwan Mansor, Ahmad Wafi Mahmood Zuhdi, Azrul Azlan Hamzah, Rhonira Latif
Topics & Concepts
SputteringMaterials scienceArgonThin filmCrystalliteSubstrate (aquarium)NitrogenLayer (electronics)Sputter depositionCrystal (programming language)NitrideComposite materialMetallurgyNanotechnologyChemistryProgramming languageOceanographyComputer scienceOrganic chemistryGeologyAcoustic Wave Resonator TechnologiesGaN-based semiconductor devices and materialsGa2O3 and related materials