Ammonia oxidation by in-situ chloride electrolysis in etching wastewater of semiconductor manufacturing using RuSnOx/Ti electrode: Effect of plating mode and metal ratio
Seto Sugianto Prabowo Rahardjo, Yu‐Jen Shih, Chen-Shiuan Fan
Topics & Concepts
ElectrolysisPlating (geology)ElectrodeAmmoniaChlorideWastewaterMetalMaterials scienceEtching (microfabrication)In situInorganic chemistryChemistryNuclear chemistryMetallurgyWaste managementComposite materialElectrolyteOrganic chemistryGeologyEngineeringGeophysicsPhysical chemistryLayer (electronics)Advanced Photocatalysis TechniquesAmmonia Synthesis and Nitrogen ReductionAdvanced oxidation water treatment