12-inch growth of uniform MoS2 monolayer for integrated circuit manufacture
Yin Xia, Xinyu Chen, Jinchen Wei, Shuiyuan Wang, Shiyou Chen, Simin Wu, Minbiao Ji, Zhengzong Sun, Zihan Xu, Wenzhong Bao, Peng Zhou
Topics & Concepts
WaferMonolayerMaterials scienceNanotechnologySemiconductorChemical vapor depositionCompound semiconductorIntegrated circuitTransistorSemiconductor device fabricationSemiconductor industrySiliconOptoelectronicsElectrical engineeringManufacturing engineeringEngineeringLayer (electronics)EpitaxyVoltage2D Materials and ApplicationsMXene and MAX Phase MaterialsGraphene research and applications