Growth of high-quality AlN films on sapphire substrate by introducing voids through growth-mode modification
Bin Tang, Hongpo Hu, Hui Wan, Jie Zhao, Liyan Gong, Yu Lei, Qiang Zhao, Shengjun Zhou
Topics & Concepts
Materials scienceSapphireOptoelectronicsSubstrate (aquarium)DislocationComposite materialTransmission electron microscopyOpticsNanotechnologyLaserOceanographyGeologyPhysicsGaN-based semiconductor devices and materialsAcoustic Wave Resonator TechnologiesGa2O3 and related materials