Remaining useful life prediction for ion etching machine cooling system using deep recurrent neural network-based approaches
Shimeng Wu, Yuchen Jiang, Hao Luo, Shen Yin
Topics & Concepts
Artificial neural networkReliability (semiconductor)Reliability engineeringWarning systemRecurrent neural networkEarly warning systemEngineeringArtificial intelligenceComputer scienceMachine learningQuantum mechanicsAerospace engineeringPower (physics)PhysicsNon-Destructive Testing TechniquesIndustrial Vision Systems and Defect DetectionAdvanced Machining and Optimization Techniques