Low temperature deposition of high quality single crystalline AlN thin films on sapphire using highly oriented monolayer MoS2 as a buffer layer
Hung-Yi Chien, Po-Chun Kuo, Hui-Ling Kao, Jyh-Shin Chen, Meei-Ru Chen, Li‐Syuan Lu, Wei-Chen Chueh, Wen‐Hao Chang
Topics & Concepts
SapphireCrystallinityMaterials scienceMonolayerChemical vapor depositionThin filmSputteringMetalorganic vapour phase epitaxySingle crystalLayer (electronics)Substrate (aquarium)EpitaxySputter depositionChemical engineeringOptoelectronicsAnalytical Chemistry (journal)CrystallographyNanotechnologyComposite materialOpticsChemistryOrganic chemistryGeologyEngineeringOceanographyLaserPhysicsGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsAcoustic Wave Resonator Technologies