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Monolithic integration of perovskite heterojunction on TFT backplanes through vapor deposition for sensitive and stable x-ray imaging

Liqi Li, Liting Tao, Lixiang Wang, Yuyang Li, Jiawen Li, Zhenyi Ni, Yanjun Fang, Deren Yang

2024Science Advances41 citationsDOIOpen Access PDF

Abstract

Metal halide perovskites exhibit substantial potential for advancing next-generation x-ray detection. However, fabricating high-performance pixelated imaging arrays remains challenging due to the substantial dark current density and stability issues associated with common organic-inorganic hybrid perovskites. Here, we develop a vapor deposition method to create the first all-inorganic perovskite heterojunction film. The heterojunction introduction effectively reduces the dark current density of detectors to about 0.8 nA·cm −2 , satisfying thin-film transistor (TFT) integration standards, while also increases sensitivity to above 2.6 × 10 4 μC·Gy air −1 ·cm −2 , thus giving rise to a record low detection limit of <1 nGy air ·s −1 among all polycrystalline perovskite–based x-ray detectors. The devices also demonstrate remarkable stability across multifarious demanding working conditions. Last, through monolithic integration of the heterojunction film with a 64 × 64 pixelated TFT array, we have achieved high-resolution real-time x-ray imaging, which paves the way for the application of all-inorganic perovskite in low-dose flat-panel x-ray detection.

Topics & Concepts

BackplanePerovskite (structure)Materials scienceThin-film transistorHeterojunctionChemical vapor depositionOptoelectronicsDeposition (geology)NanotechnologyThin filmComputer scienceComputer hardwareChemistryLayer (electronics)GeologyPaleontologyCrystallographySedimentPerovskite Materials and ApplicationsElectronic and Structural Properties of OxidesAdvanced Semiconductor Detectors and Materials
Monolithic integration of perovskite heterojunction on TFT backplanes through vapor deposition for sensitive and stable x-ray imaging | Litcius