Combining X-ray Nano Tomography with focused ion beam serial section imaging — Application of correlative tomography to integrated circuits
Fabian Lutter, Philipp Stahlhut, Kilian Dremel, Simon Zabler, Jonas Fell, Hans‐Georg Herrmann, Randolf Hanke
2021Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms18 citationsDOI
Topics & Concepts
TomographyFocused ion beamMaterials scienceSample (material)Image resolutionResolution (logic)Volume (thermodynamics)OpticsMedical physicsComputer scienceArtificial intelligenceIonPhysicsThermodynamicsQuantum mechanicsAdvanced X-ray Imaging TechniquesAdvanced Electron Microscopy Techniques and ApplicationsAdvanced X-ray and CT Imaging