Special Issue “Advanced Coating Technology by Physical Vapor Deposition and Applications”
Chuen‐Lin Tien
Abstract
Coating technology covers a wide range of fields [...]
Topics & Concepts
CoatingMaterials scienceDeposition (geology)Chemical vapor depositionPhysical vapor depositionEngineering physicsNanotechnologyEnvironmental scienceEngineeringGeologyPaleontologySedimentMetal and Thin Film MechanicsCopper Interconnects and ReliabilityNanofabrication and Lithography Techniques