Surface planarization of zirconia ceramic achieved by polyacrylamide grafted nanodiamond composite abrasives through chemical mechanical polishing
Ruyue Ding, Hong Lei, Lei Xu, Yi Chen
Topics & Concepts
Materials scienceNanodiamondChemical-mechanical planarizationPolishingCubic zirconiaComposite materialCeramicX-ray photoelectron spectroscopyContact angleSurface roughnessFourier transform infrared spectroscopyScanning electron microscopeWaferDiamondChemical engineeringNanotechnologyEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchTunneling and Rock Mechanics