A novel slurry for chemical mechanical polishing of single crystal diamond
Longxing Liao, Zhenyu Zhang, Fanning Meng, Dongdong Liu, Bin Wu, Yubiao Li, Wenxiang Xie
Topics & Concepts
Surface roughnessMaterials scienceSlurryChemical-mechanical planarizationPolishingAbrasiveDiamondX-ray photoelectron spectroscopyAdsorptionSurface finishChemical engineeringFerrousLayer (electronics)Composite materialMetallurgyChemistryOrganic chemistryEngineeringDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesTunneling and Rock Mechanics